Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasunari Suzuki0
Koji Takei0
Ryo Fukasawa0
Sumihiro Ichikawa0
Daisuke Matono0
Date of Patent
January 19, 2010
0Patent Application Number
113305200
Date Filed
January 11, 2006
0Patent Primary Examiner
Patent abstract
A method and apparatus for processing a thin film able to easily form grooves in a conductive thin film on an insulating substrate, comprising bringing a first electrode into contact with the conductive thin film, maintaining a conductive state between a tip of a second electrode with a voltage applied with respect to the first electrode and the surface of the conductive thin film, and using the tip of the second electrode to scan the conductive thin film so as to thereby form grooves passing through the thickness of the conductive thin film and exposing the surface of the insulating substrate at their bottoms in the conductive thin film.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
