Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Deming Liu0
Ping Liang Tu0
Man Chung Raymond Ng0
Kui Kam Lam0
Date of Patent
January 19, 2010
0Patent Application Number
115360510
Date Filed
September 28, 2006
0Patent Primary Examiner
Patent abstract
A manufacturing process and apparatus therefore are provided for processing an electronic device comprising oxidizable material during processing. The electronic device is located inside a chamber and is heated a processing temperature with a heater. A reductive atmosphere is created in the chamber by supplying a gas comprising glycolic acid vapor while processing the electronic device at the processing temperature.
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