US Patent 7646908 Defect detection apparatus and defect detection method
Patent 7646908 was granted and assigned to Dainippon Screen Mfg Co on January, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 15, 2005
0
Date of Patent
January 12, 2010
0
Patent Application Number
11203147
0
Patent Inventor Names
Hiroyuki Onishi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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