US Patent 7646489 Apparatus and method for measuring film thickness
Patent 7646489 was granted and assigned to Yokogawa Electric on January, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 23, 2008
Date of Patent
January 12, 2010
Patent Application Number
12108235
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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