US Patent 7639105 Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators
Patent 7639105 was granted and assigned to Georgia Tech Research Corporation on December, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 18, 2008
0
Date of Patent
December 29, 2009
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Patent Application Number
12009527
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Patent Citations Received
Patent Inventor Names
Farrokh Ayazi
0
Reza Abdolvand
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Gavin Kar-Fal Ho
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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