Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ping-Pang Hsieh0
Date of Patent
December 29, 2009
0Patent Application Number
116089270
Date Filed
December 11, 2006
0Patent Primary Examiner
Patent abstract
A method for forming a uniform doped region in a substrate having a non-uniform material layer thereon is provided. The non-uniform material layer is removed form the substrate. Thereafter, a treatment process is performed to form an offset material layer on a predetermined doped region of the substrate. Next, an ion implantation process is performed to form the uniform doped region in the predetermined doped region below the offset material layer.
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