US Patent 7636189 Display methods and apparatus

The invention relates to spatial light modulators for use in display apparatus. In particular, the invention relates to spatial light modulators that include a substrate defining a plane and a shutter suspended over the substrate by a compliant beam. The compliant beam has a cross-sectional thickness, in a dimension parallel to the plane of the substrate, between about 0.2 μm and about 10 μm. In one embodiment, a thickness of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.