US Patent 7631286 Automated metrology recipe generation
Patent 7631286 was granted and assigned to Wafertech on December, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 30, 2005
0
Date of Patent
December 8, 2009
0
Patent Application Number
11323255
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Patent Inventor Names
Scott Westfall
0
Daniel Piper
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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