US Patent 7629575 Charge control for ionic charge accumulation devices

Patent 7629575 was granted and assigned to Varian, Inc. on December, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Varian, Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7629575

Date of Patent

December 8, 2009

Patent Application Number

12004136

Date Filed

December 19, 2007

Patent Primary Examiner

‌

Kiet T Nguyen

Patent abstract

A method for controlling charge flux into a charge accumulation device includes determining a charge accumulation time during which charges are to be accumulated in the charge accumulation device, measuring a charge flux of a first ion beam produced from an ion source, determining a target number of charges to be accumulated in the charge accumulation device during the charge accumulation time based on the measured charge flux and, based on the determined target number of charges, modulating a second ion beam produced from the ion source to cause the target number of charges from the second ion beam to be accumulated in the charge accumulation device during the charge accumulation time. An ion processing device is configured for controlling the charge flux. An ion beam modulator modulates the ion beam.