Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stanley Chu0
Hyon-Jin Kwon0
Sisira Kankanam Gamage0
Date of Patent
November 24, 2009
Patent Application Number
11210309
Date Filed
August 24, 2005
Patent Primary Examiner
Patent abstract
A pressure sensor includes a base substrate silicon fusion bonded to a cap substrate with a chamber disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity and a diaphragm portion positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment.
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