Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 17, 2009
0Patent Application Number
116560040
Date Filed
January 22, 2007
0Patent Primary Examiner
Patent abstract
Radiation is projected onto a plurality of targets on a substrate. By assuming that the overlay error derivable from asymmetry varies smoothly across the substrate, the number of targets measured can be reduced. This may result in a smaller area of the scribe lane being used by targets for each layer of the substrate.
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