Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joseph G. Ameen0
David B. James0
Date of Patent
November 17, 2009
0Patent Application Number
108543210
Date Filed
May 25, 2004
0Patent Primary Examiner
Patent abstract
The present invention provides polishing pad for electrochemical mechanical polishing. The pad comprises a cellular polymeric layer overlying a conductive substrate, the cellular polymeric layer having a thickness less than 1.5 mm.
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