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US Patent 7616322 Cyclic error compensation in interferometry systems

Patent 7616322 was granted and assigned to Zygo Corporation on November, 2009 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Current Assignee
Zygo Corporation
Zygo Corporation
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
76163221
Patent Inventor Names
Alan H. Field1
Henry A. Hill1
Frank C. Demarest1
Date of Patent
November 10, 2009
1
Patent Application Number
114621851
Date Filed
August 3, 2006
1
Patent Citations Received
‌
US Patent 12135211 Device for measuring a substrate and method for correcting cyclic error components of an interferometer
2
Patent Primary Examiner
‌
Patrick J Connolly
1
Patent abstract

An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).

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