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US Patent 7608844 Charged particle beam drawing apparatus

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
76088440
Patent Inventor Names
Yuji Inoue0
Haruo Yoda0
Kimiaki Ando0
Yoshikiyo Yui0
Date of Patent
October 27, 2009
0
Patent Application Number
111367030
Date Filed
May 25, 2005
0
Patent Primary Examiner
‌
David A. Vanore
0
Patent abstract

In the present invention, vector data developing unit, ends separating unit, overlap removing unit and bitmapped data generating unit are sequentially connected in order to make pipeline processing. In addition, data of each raster is orderly arranged as a unit so that each processor can process data of each raster at a time. Each processor can make the pipeline processing to fast generate data. In addition, small-scale circuits can be used to realize the system because each raster can be processed as a unit of processing. Moreover, since data is orderly arranged before being processed, multi-valued bitmapped data can be generated in the order of drawing. Therefore, the drawing operation and data generating operation can be performed in parallel without use of any large-scale storage device.

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