Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael K. Gallagher0
Anthony Zampini0
Chi Q. Truong0
Dana A. Gronbeck0
Amy M. Kwok0
Date of Patent
October 20, 2009
0Patent Application Number
115121400
Date Filed
August 29, 2006
0Patent Primary Examiner
Patent abstract
The invention includes new organic-containing compositions that can function as an antireflective layer for an overcoated photoresist. Compositions of the invention also can serve effectively as a hard mask layer by exhibiting a sufficient plasma etch selectivity from an undercoated layer. Preferred compositions of the invention have a high Si content and comprise a blend of distinct resins.
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