Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Randall G. Percival0
Billy W. Ward0
John A. Notte, IV0
Louis S. Farkas, III0
Date of Patent
October 13, 2009
Patent Application Number
11385215
Date Filed
March 20, 2006
Patent Primary Examiner
Patent abstract
In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.
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