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US Patent 7600989 Leak detector comprising an inlet

Patent 7600989 was granted and assigned to INFICON on October, 2009 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
INFICON
INFICON
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
76009890
Patent Inventor Names
Thomas Böhm0
Date of Patent
October 13, 2009
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Patent Application Number
105428170
Date Filed
January 13, 2004
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Patent Primary Examiner
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Charles G Freay
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Patent abstract

A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.

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