US Patent 7600989 Leak detector comprising an inlet

Patent 7600989 was granted and assigned to INFICON on October, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

INFICON

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

76009890

Patent Inventor Names

Thomas Böhm0

Date of Patent

October 13, 2009

Patent Application Number

105428170

Date Filed

January 13, 2004

Patent Primary Examiner

‌

Charles G Freay

Patent abstract

A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.