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US Patent 7600916 Target alignment for X-ray scattering measurements

Patent 7600916 was granted and assigned to Jordan Valley Semiconductors on October, 2009 by the United States Patent and Trademark Office.

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Patent
Patent

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Current Assignee
Jordan Valley Semiconductors
Jordan Valley Semiconductors
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7600916
Patent Inventor Names
Asher Peled0
David Berman0
Alexander Krokhmal0
Boris Yokhin0
Date of Patent
October 13, 2009
Patent Application Number
11892005
Date Filed
August 17, 2007
Patent Citations Received
‌
US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Primary Examiner
‌
Irakli Kiknadze
Patent abstract

A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on a structure in the sample such that the X-rays are scattered from the structure in a pattern of stripes, and receiving the scattered X-rays using an array of detectors. A relative alignment between the sample and the array is adjusted so that the stripes are parallel to the detectors.

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