Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Derk Jan Wilfred Klunder0
Johannes Hubertus Josephina Moors0
Maarten Marinus Johannes Wilhelmus Van Herpen0
Vadim Yevgenyevich Banine0
Date of Patent
October 6, 2009
0Patent Application Number
114516010
Date Filed
June 13, 2006
0Patent Primary Examiner
Patent abstract
A lithographic apparatus is disclosed. The apparatus includes a source for supplying hydrogen radicals, a guide for use in conjunction with the source, for directing hydrogen radicals to an application surface to be targeted by the hydrogen radicals. The guide is provided with a coating having a hydrogen radical recombination constant of less than 0.2. In this way, the radicals can be transported with reduced losses and are able to better interact with remaining contaminants on application surfaces, such as mirror surfaces.
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