Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Klaus Neubeck0
Rainer Ostermann0
Phannara Aing0
Benoit Riou0
Mustapha Elyaakoubi0
Date of Patent
September 29, 2009
Patent Application Number
10898458
Date Filed
July 23, 2004
Patent Primary Examiner
Patent abstract
A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a supply signal with maximum energy at a first frequency which is at least in the Hf frequency range; removing the workpiece treated from the vacuum chamber; performing a cleaning inside the vacuum chamber, thereby establishing the plasma discharge by a supply signal with maximum energy at a second frequency higher than the Hf frequency; and repeating these steps at least one time.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
