Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yun Bok Lee0
Kyeong A. Shin0
Yong Sung Ham0
Date of Patent
September 29, 2009
0Patent Application Number
108428780
Date Filed
May 10, 2004
0Patent Primary Examiner
Patent abstract
A method of forming an alignment layer with a multi-domain is provided. The alignment layer is formed on a substrate. A mask having a transmission part and a shielding part is aligned over the substrate. First and second alignment directions in the alignment layer are formed by irradiating an ion beam onto the substrate at different irradiation angles. Using the aforementioned ion-beam irradiation process eliminates the need for multiple rubbing processes to create the multi-domain alignment layer.
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