US Patent 7586235 Matching circuit for megasonic transducer device

Patent 7586235 was granted and assigned to Applied Materials on September, 2009 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

75862350

Date of Patent

September 8, 2009

Patent Application Number

117038930

Date Filed

February 7, 2007

Patent Primary Examiner

‌

Charles D. Garber

Patent abstract

A method and apparatus for matching impedance magnitude and impedance phase for an acoustic-wave transducer load and an RF power source. The acoustic-wave transducer load has a load impedance magnitude and phase. The RF power source has a source impedance magnitude and phase. In one embodiment of the invention, a transformer matches the source and load impedance magnitudes. A capacitor, connected in series with the transformer, matches the source impedance phase to the load impedance phase.