US Patent 7585418 Lithographic mask and manufacturing method thereof
Patent 7585418 was granted and assigned to Hoya on September, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
0
Date Filed
June 24, 2005
0
Date of Patent
September 8, 2009
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Patent Application Number
11165536
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Patent Inventor Names
Junji Mori
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Katsuhiro Takushima
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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