US Patent 7583386 Method and apparatus for optically analyzing a surface

Patent 7583386 was granted and assigned to KLA-Tencor on September, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

KLA-Tencor

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7583386

Date of Patent

September 1, 2009

Patent Application Number

12140154

Date Filed

June 16, 2008

Patent Primary Examiner

‌

Tarifur Chowdhury

Patent abstract

In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a radial motor to move an optical head in a radial direction to detect defects at locations displaced from the edge of the wafer, and a rotational motor to rotate the optical head around the edge of the wafer to detect defects on the edge of the wafer.