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US Patent 7583386 Method and apparatus for optically analyzing a surface

Patent 7583386 was granted and assigned to KLA-Tencor on September, 2009 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

KLA-Tencor

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7583386

Date of Patent

September 1, 2009

Patent Application Number

12140154

Date Filed

June 16, 2008

Patent Primary Examiner

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Tarifur Chowdhury

Patent abstract

In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a radial motor to move an optical head in a radial direction to detect defects at locations displaced from the edge of the wafer, and a rotational motor to rotate the optical head around the edge of the wafer to detect defects on the edge of the wafer.