An integrated circuit device may include a substrate, a plurality of storage electrode landing pads on the substrate, and a plurality of storage electrodes. Each of the plurality of storage electrodes may be on a portion of a respective one of the plurality of storage electrode landing pads. In addition, an insulating support layer may be on the substrate, on portions of the storage electrode landing pads that are free of the storage electrodes, and on portions of sidewalls of storage electrodes. Moreover, portions of sidewalls of the storage electrodes may be free of the insulating support layer. Related methods and structures are also discussed.