US Patent 7582540 Method for manufacturing SOI wafer

This method for manufacturing an SOI wafer includes: a step of forming insulating films in a front surface and a mirror-polished rear surface of an active layer wafer; a step of removing the insulating film in the front surface of the active layer wafer; a step of subjecting the active layer wafer to a rapid thermal annealing process; a step of bonding the active layer wafer and a support wafer with the insulating film formed in the rear surface therebetween so as to form a bonded wafer; a step of subjecting the bonded wafer to a heat treatment for bonding enhancement which enhances a bonding strength between the active layer wafer and the support wafer; and a step of thinning the active layer wafer in the bonded wafer so as to form an SOI layer.