US Patent 7580174 Anti-stiction gas-phase lubricant for micromechanical systems
Patent 7580174 was granted and assigned to Miradia on August, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 22, 2005
0
Date of Patent
August 25, 2009
0
Patent Application Number
11315607
0
Patent Inventor Names
Fulin Xiong
0
Dongmin Chen
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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