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US Patent 7579210 Planar segmented contact

Patent 7579210 was granted and assigned to Ovonyx on August, 2009 by the United States Patent and Trademark Office.

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Current Assignee
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Ovonyx
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
75792100
Patent Inventor Names
Guy Wicker0
Date of Patent
August 25, 2009
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Patent Application Number
120549190
Date Filed
March 25, 2008
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Patent Primary Examiner
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Thanh V Pham
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Patent abstract

An electronic device including a planar segmented contact. A method for forming the device includes depositing a first insulator on a substrate, forming an opening in the first insulator, disposing a conductive material in the opening where the conductive material defines two or more conductive regions, forming a second insulator over the conductive layer, removing a portion of the second insulator to expose less than all of the conductive regions, recessing at least one of the exposed conductive regions, forming a third insulator over the recessed conductive region, and planarizing to expose at least one of the non-recessed conductive regions without exposing a recessed conductive region. An electrically stimulable material may then be formed over an exposed non-recessed conductive region.

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