Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideyoshi Tsuruta0
Yasufumi Aihara0
Ikuhisa Morioka0
Date of Patent
August 18, 2009
Patent Application Number
11687824
Date Filed
March 19, 2007
Patent Primary Examiner
Patent abstract
An electrostatic chuck includes a ceramic base having an electrode embedded in vicinity to a holding face for holding a substrate. On a back side of this ceramic base, provided are a terminal connected to the electrode, a wafer temperature control member, and an insulating member for insulating the temperature control member from the terminal. This insulating member has a flange portion on its end portion in contact with the ceramic base, and is made of highly thermal conductive ceramics.
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