Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 11, 2009
Patent Application Number
11458828
Date Filed
July 20, 2006
Patent Primary Examiner
Patent abstract
A semiconductor structure. The structure includes (a) a semiconductor substrate; (b) a hard mask layer on top of the semiconductor substrate; and (c) a hard mask layer opening in the hard mask layer. The semiconductor substrate is exposed to the atmosphere through the hard mask layer opening. The hard mask layer opening comprises a top portion and a bottom portion, wherein the bottom portion is disposed between the top portion and the semiconductor substrate. The bottom portion has a greater lateral width than the top portion.
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