Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takao Kusaka0
Junichi Seki0
Nobuki Yoshimatsu0
Susumu Yasuda0
Date of Patent
August 4, 2009
0Patent Application Number
116121040
Date Filed
December 18, 2006
0Patent Primary Examiner
Patent abstract
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
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