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US Patent 7569791 Inductively-driven plasma light source

Patent 7569791 was granted and assigned to energetiq technology, inc. on August, 2009 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee
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energetiq technology, inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
75697910
Patent Inventor Names
Matthew M. Besen0
Donald K. Smith0
Raghuram L. V. Petluri0
Date of Patent
August 4, 2009
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Patent Application Number
115287090
Date Filed
September 27, 2006
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Patent Citations Received
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US Patent 11972924 Pulsed voltage source for plasma processing applications
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US Patent 12125673 Pulsed voltage source for plasma processing applications
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Patent Primary Examiner
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Mark H Paschall
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Patent abstract

An electromagnetic radiation source includes a toroidal chamber that contains an ionizable medium. The electromagnetic radiation source also includes a magnetic core that surrounds a portion of the toroidal chamber. The electromagnetic radiation source also includes a pulse power system for providing pulses of energy to the magnetic core for delivering power to a plasma formed in the toroidal chamber to produce electromagnetic radiation that radiates radially through walls of the toroidal chamber.

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