Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takenori Yoshizawa0
Hideo Taniguchi0
Hiroto Shibata0
Date of Patent
August 4, 2009
Patent Application Number
10947235
Date Filed
September 23, 2004
Patent Primary Examiner
Patent abstract
A substrate accommodating tray pallet has a substrate in a horizontal state, includes openings for inserting substrate removal tools for raising the substrate, and is used for transferring substrate accommodating trays which can be vertically stacked, wherein: the substrate accommodating trays are to be mounted on an upper surface; and substrate removal tool insertion openings for inserting the substrate removal tools are positioned so as to oppose openings of the mounted substrate accommodating trays.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
