Patent 7566920 was granted and assigned to Panasonic on July, 2009 by the United States Patent and Trademark Office.
A base mesa finger (an emitter ledge layer 15, a base layer 16, and a collector layer 17) is interposed between two collector fingers (collector electrodes 13), and on the base mesa finger, a base finger (a base electrode 12) and two emitter fingers (an emitter layer 14 and an emitter electrode 11) on both sides of the base finger, are formed. The two emitter fingers are formed symmetric with respect to the base finger as a reference.