Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 28, 2009
Patent Application Number
10902543
Date Filed
July 29, 2004
Patent Primary Examiner
Patent abstract
Methods for fabricating flash memory devices are disclosed. A disclosed method comprises: forming a polysilicon layer on a semiconductor substrate; injecting dopants having stepped implantation energy levels into the polysilicon layer; forming a photoresist pattern on the polysilicon layer; and etching the polysilicon layer to form a floating gate.
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