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US Patent 7564568 Phase shifting interferometry with multiple accumulation

Patent 7564568 was granted and assigned to Zygo Corporation on July, 2009 by the United States Patent and Trademark Office.

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Current Assignee
Zygo Corporation
Zygo Corporation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7564568
Date of Patent
July 21, 2009
Patent Application Number
11680968
Date Filed
March 1, 2007
Patent Primary Examiner
‌
Tarifur Chowdhury
Patent abstract

An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.

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