Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 21, 2009
Patent Application Number
11446552
Date Filed
June 2, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.
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