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US Patent 7564246 Pressure sensor using field emission of carbon nano-tube

Patent 7564246 was granted and assigned to Korea Research Institute of Standards and Science on July, 2009 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

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Korea Research Institute of Standards and Science

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

75642460

Patent Inventor Names

Sam Yong Woo0

Boo Shik Kim0

In Mook Choi0

Date of Patent

July 21, 2009

Patent Application Number

114727420

Date Filed

June 22, 2006

Patent Primary Examiner

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Vincent Q Nguyen

Patent abstract

Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.