Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthias Metz0
Markus Ulm0
Tino Fuchs0
Silvia Kronmueller0
Brian Stark0
Franz Laermer0
Date of Patent
July 21, 2009
Patent Application Number
11510040
Date Filed
August 25, 2006
Patent Primary Examiner
Patent abstract
An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
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