Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasufumi Koyama0
Kenji Hashinoki0
Satoshi Yamamoto0
Date of Patent
July 21, 2009
0Patent Application Number
109421800
Date Filed
September 16, 2004
0Patent Primary Examiner
Patent abstract
A substrate treating apparatus is capable of promptly heating substrates after exposure, and avoiding an adverse thermal influence on an exposing apparatus. A developing block includes heating modules for heating exposed substrates. An interface block is interposed between the heating modules and the exposing apparatus to isolate the exposing apparatus from the thermal influence of the heating modules. The interface block has a transport mechanism for transporting the substrates to the heating modules, whereby the exposed substrates are promptly transferred to the heating modules.
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