Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masahiro Sunohara0
Date of Patent
July 7, 2009
0Patent Application Number
115235760
Date Filed
September 20, 2006
0Patent Primary Examiner
Patent abstract
A insulation film removing tape 38 is pasted on a metal film 34 so as to cover an opening portion 32, then an insulation film 17 is formed so as to cover the side wall of a through hole 21 from the second major surface 11B side of the semiconductor substrate 11, and thereafter the insulation film removing tape 38 is removed.
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