US Patent 7545481 Lithographic apparatus and device manufacturing method
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Patent Inventor Names
Bernard Gellrich0
Bob Streefkerk0
Christiaan Alexander Hoogendam0
Erik Roelof Loopstra0
Jan Haisma0
Johannes Catharinus Hubertus Mulkens0
Johannes Jacobus Matheus Baselmans0
Nicodemus Hattu0
Paul Graupner0
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Patent abstract
The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.
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US Patent 07545481 Lithographic apparatus and device manufacturing method US Patent 7545481 Lithographic apparatus and device manufacturing method
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Patent Number
075454810
Patent Number
75454810
Edits on 6 Apr, 2023
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Patent Jurisdiction
Patent Number
075454810
Date of Patent
June 9, 2009
0Patent Application Number
107196830
Date Filed
November 24, 2003
0Official Website
Patent Primary Examiner
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US Patent 07545481 Lithographic apparatus and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07545481
Date of patent
June 9, 2009
Patent application number
10719683
Date Filed
November 24, 2003
Patent primary examiner
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