US Patent 7542132 Raman spectroscopy as integrated chemical metrology
Patent 7542132 was granted and assigned to Applied Materials on June, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 30, 2007
Date of Patent
June 2, 2009
Patent Application Number
11830202
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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