US Patent 7541267 Reversed T-shaped finfet

Patent 7541267 was granted and assigned to Advanced Micro Devices on June, 2009 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Advanced Micro Devices

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7541267

Date of Patent

June 2, 2009

Patent Application Number

11765611

Date Filed

June 20, 2007

Patent Primary Examiner

‌

Alexander G Ghyka

Patent abstract

A method includes forming a first rectangular mesa from a layer of semiconducting material and forming a first dielectric layer around the first mesa. The method further includes forming a first rectangular mask over a first portion of the first mesa leaving an exposed second portion of the first mesa and etching the exposed second portion of the first mesa to produce a reversed T-shaped fin from the first mesa.