Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 26, 2009
Patent Application Number
11014062
Date Filed
December 17, 2004
Patent Primary Examiner
Patent abstract
A method for determining a polarization state of light passed through the projection lens of a lithographic apparatus is described. Polarizing structures are disposed on an object side of the projection lens of the lithographic apparatus. By measuring light that has passed through the polarizing structures information regarding the polarization characteristics of the projection lens can be determined.
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