Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rempei Nakata0
Hideshi Miyajima0
Keiji Fujita0
Miyoko Shimada0
Hideaki Masuda0
Date of Patent
May 19, 2009
0Patent Application Number
110941820
Date Filed
March 31, 2005
0Patent Primary Examiner
Patent abstract
The formation of an interlayer insulating film above a substrate, the formation of an insulating film of an organic material on the interlayer insulating film thereafter, and the irradiation of the insulating film of an organic material and the interlayer insulating film with electron beams, thereby curing at least the insulating film of an organic material, are proposed.
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