Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mario Scurati0
Date of Patent
May 5, 2009
0Patent Application Number
106632390
Date Filed
September 16, 2003
0Patent Primary Examiner
Patent abstract
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
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