Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 28, 2009
Patent Application Number
11689212
Date Filed
March 21, 2007
Patent Primary Examiner
Patent abstract
An insulating film includes an oxide of a metal selected from Hf and Zr, the oxide being doped by at least one of Ba, Sr and Mg. And the insulating film satisfies the following formula (1):0.06 at %≦[Ba]+[Sr]+[Mg]≦1.4 at % (1)wherein [Ba] represents atomic % of Ba, [Sr] represents atomic % of Sr, and [Mg] represents atomic % of Mg.
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