Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuaki Hamada0
Koji Ohashi0
Setsuya Iwashita0
Takeshi Kijima0
Date of Patent
April 28, 2009
0Patent Application Number
115042550
Date Filed
August 15, 2006
0Patent Primary Examiner
Patent abstract
An insulating target material for obtaining a conductive complex oxide film represented by a general formula ABO3, the insulating target material including an oxide of an element A, an oxide of an element B, and at least one of an Si compound and a Ge compound.
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