US Patent 7520742 Nanoprint equipment and method of making fine structure

Patent 7520742 was granted and assigned to Hitachi on April, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7520742

Date of Patent

April 21, 2009

Patent Application Number

10801579

Date Filed

March 17, 2004

Patent Primary Examiner

James Mackey

Patent abstract

A pillar with a high aspect ratio is transferred by a nanoprinting method. In order to form a fine structure on a substrate, a nanoprinting apparatus heats and presses the substrate and a mold with a fine concave-convex pattern formed thereon, the mold having a mechanism for transferring and applying a mold-releasing agent. A method for transferring a fine structure using the aforementioned nanoprinting apparatus.